INVESTIGATION OF THE PROCESS OF MUTUAL DIFFUSION OF A SEMICONDUCTOR SUBSTRATE AND PROCESS METALS
Albert I. Nazmiev; Igor D. Mikheev
- Published
- Publisher
- T.F. Gorbachev Kuzbass State Technicak University
- Journal / collection
- Vestnik of Kuzbass State Technical University
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.26730/1999-4125-2024-4-50-57
The original publisher provides the full text and its access options.
Cite this source
Albert I. Nazmiev; Igor D. Mikheev. INVESTIGATION OF THE PROCESS OF MUTUAL DIFFUSION OF A SEMICONDUCTOR SUBSTRATE AND PROCESS METALS. Vestnik of Kuzbass State Technical University. 2024-09-26. https://doi.org/10.26730/1999-4125-2024-4-50-57