Solidification of Cyclohexanol in Sublimation Drying for Enhancing Semiconductor Manufacturing: Experimental and Mathematical Studies
Minghan Xu; Mohammaderfan Mohit; Yosuke Hanawa; Jianliang Zhang; Junichi Yoshida; Koichi Sawada; Yuta Sasaki; Atsushi Sakuma; Agus P. Sasmito
- Published
- Publisher
- American Society of Mechanical Engineers
- Journal / collection
- Volume 9: Heat Transfer and Thermal Engineering
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1115/imece2024-143552
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Cite this source
Minghan Xu; Mohammaderfan Mohit; Yosuke Hanawa; Jianliang Zhang; Junichi Yoshida; Koichi Sawada; Yuta Sasaki; Atsushi Sakuma; Agus P. Sasmito. Solidification of Cyclohexanol in Sublimation Drying for Enhancing Semiconductor Manufacturing: Experimental and Mathematical Studies. Volume 9: Heat Transfer and Thermal Engineering. 2024-11-17. https://doi.org/10.1115/imece2024-143552