Strain analysis comparison in complementary and nanosheet field-effect transistor devices: Nanobeam vs Bessel electron diffraction
Paola Favia; Anabela Veloso; Geert Eneman; Ankit Nalin Mehta; Xiuju Zhou; Olivier Richard; Jef Geypen; Eva Grieten
- Published
- Publisher
- EDP Sciences
- Journal / collection
- BIO Web of Conferences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1051/bioconf/202412924025
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Cite this source
Paola Favia; Anabela Veloso; Geert Eneman; Ankit Nalin Mehta; Xiuju Zhou; Olivier Richard; Jef Geypen; Eva Grieten. Strain analysis comparison in complementary and nanosheet field-effect transistor devices: Nanobeam vs Bessel electron diffraction. BIO Web of Conferences. 2024. https://doi.org/10.1051/bioconf/202412924025