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Research literature / Conference paper

On the Scalability of Nanosheet Oxide Semiconductor Transistors

Masaharu Kobayashi; Kaito Hikake; Xingyu Huang; Sunghun Kim; Kota Sakai; Zhuo Li; Tomoko Mizutani; Takuya Saraya; Toshiro Hiramoto; Takanori Takahashi; Mutsunori Uenuma; Yukiharu Uraoka

Published
Publisher
IEEE
Journal / collection
2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/edtm61175.2025.11040950

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Masaharu Kobayashi; Kaito Hikake; Xingyu Huang; Sunghun Kim; Kota Sakai; Zhuo Li; Tomoko Mizutani; Takuya Saraya; Toshiro Hiramoto; Takanori Takahashi; Mutsunori Uenuma; Yukiharu Uraoka. On the Scalability of Nanosheet Oxide Semiconductor Transistors. 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). 2025-03-09. https://doi.org/10.1109/edtm61175.2025.11040950

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