Testing plan of NA 0.8 deep UV objective system for semiconductor defect inspection
Yunjong Kim; Jihun Kim; JaeHee Byun; HanRim Chae; KyoungSang Moon; Minkyu Jung; Wonbin Choi; Ingu Chang; Hyunil Cho
- Published
- Publisher
- SPIE
- Journal / collection
- Photomask Technology 2024
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3037799
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Cite this source
Yunjong Kim; Jihun Kim; JaeHee Byun; HanRim Chae; KyoungSang Moon; Minkyu Jung; Wonbin Choi; Ingu Chang; Hyunil Cho. Testing plan of NA 0.8 deep UV objective system for semiconductor defect inspection. Photomask Technology 2024. 2024-11-20. https://doi.org/10.1117/12.3037799