A Novel Gan-Based Data Augmentation Algorithm for Semiconductor Defect Inspection
Yang Liu; Yuanjun Guan; Tianyan Han; Can Ma; Jiayi Wang; Tao Wang; Qianchuan Yi; Lilei Hu
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/cstic61820.2024.10531884
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Cite this source
Yang Liu; Yuanjun Guan; Tianyan Han; Can Ma; Jiayi Wang; Tao Wang; Qianchuan Yi; Lilei Hu. A Novel Gan-Based Data Augmentation Algorithm for Semiconductor Defect Inspection. 2024 Conference of Science and Technology for Integrated Circuits (CSTIC). 2024-03-17. https://doi.org/10.1109/cstic61820.2024.10531884