Enhanced erosion resistance in semiconductor reactive ion etcher focus ring with large grain PVT SiC
Jongbeom Kim; Gyeongsu Cho; Young-Hoon Choi; Ho-Sung Son; Heung Nam Han; Joo Hyung Lee; Taehwan Lim; Jung Han Kim; Kyu Hwan Oh
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Vacuum
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.vacuum.2024.113062
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Cite this source
Jongbeom Kim; Gyeongsu Cho; Young-Hoon Choi; Ho-Sung Son; Heung Nam Han; Joo Hyung Lee; Taehwan Lim; Jung Han Kim; Kyu Hwan Oh. Enhanced erosion resistance in semiconductor reactive ion etcher focus ring with large grain PVT SiC. Vacuum. 2024-04. https://doi.org/10.1016/j.vacuum.2024.113062