Raman spectroscopy capabilities for advanced semiconductor technology devices
Thomas Nuytten; Janusz Bogdanowicz; Stefanie Sergeant; Claudia Fleischmann
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Applied Physics Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0219438
The original publisher provides the full text and its access options.
Cite this source
Thomas Nuytten; Janusz Bogdanowicz; Stefanie Sergeant; Claudia Fleischmann. Raman spectroscopy capabilities for advanced semiconductor technology devices. Applied Physics Letters. 2024-07-29. https://doi.org/10.1063/5.0219438