Anomaly Detection System for Semiconductor Deposition Process using Transformer
Min-Ho Ha; Saba Arshad; Min-Seon Chae; Sung-Chul Yun; Seung-Hwan Kim; Tae-Hyoung Park
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 24th International Conference on Control, Automation and Systems (ICCAS)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.23919/iccas63016.2024.10773356
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Cite this source
Min-Ho Ha; Saba Arshad; Min-Seon Chae; Sung-Chul Yun; Seung-Hwan Kim; Tae-Hyoung Park. Anomaly Detection System for Semiconductor Deposition Process using Transformer. 2024 24th International Conference on Control, Automation and Systems (ICCAS). 2024-10-29. https://doi.org/10.23919/iccas63016.2024.10773356