Synthesis and property enhancement of Ti-Si/SiC composites by reactive infiltration for semiconductor applications
Ziyan Zhao; Yan Liu; Bo Zhou; Keying Zhang; Xuejian Liu; Zhengren Huang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Ceramics International
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ceramint.2024.08.423
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Cite this source
Ziyan Zhao; Yan Liu; Bo Zhou; Keying Zhang; Xuejian Liu; Zhengren Huang. Synthesis and property enhancement of Ti-Si/SiC composites by reactive infiltration for semiconductor applications. Ceramics International. 2024-11. https://doi.org/10.1016/j.ceramint.2024.08.423