Manufacturing of 3D submicronic structures at wafer scale
Diana Fernandez Rodas; Jérôme Rêche; Ivanie Mendes; Raluca Tiron
- Published
- Publisher
- SPIE
- Journal / collection
- Novel Patterning Technologies 2024
- Research area
- Industrial systems
- Source type
- Conference paper
- DOI
- 10.1117/12.3009978
The original publisher provides the full text and its access options.
Cite this source
Diana Fernandez Rodas; Jérôme Rêche; Ivanie Mendes; Raluca Tiron. Manufacturing of 3D submicronic structures at wafer scale. Novel Patterning Technologies 2024. 2024-04-09. https://doi.org/10.1117/12.3009978