Advancing Semiconductor Fabrication: A CNN-Based Wafer Defect Detection with XAI Insights
Md Rifat Hossen; Md Nahian Abdullah
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 International Conference on Electrical, Computer and Communication Engineering (ECCE)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/ecce64574.2025.11013292
The original publisher provides the full text and its access options.
Cite this source
Md Rifat Hossen; Md Nahian Abdullah. Advancing Semiconductor Fabrication: A CNN-Based Wafer Defect Detection with XAI Insights. 2025 International Conference on Electrical, Computer and Communication Engineering (ECCE). 2025-02-13. https://doi.org/10.1109/ecce64574.2025.11013292