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Research literature / Conference paper

Intermediate Variable Extraction for Digital Twin Modeling in the Semiconductor Manufacturing Process

Ryosuke Okachi; Masanori Usui; Tomohiko Mori; Junya Muramatsu; Makoto Kuwahara; Daigo Kikuta

Published
Publisher
IEEE
Journal / collection
2024 International Symposium on Semiconductor Manufacturing (ISSM)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/issm64832.2024.10874952

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Ryosuke Okachi; Masanori Usui; Tomohiko Mori; Junya Muramatsu; Makoto Kuwahara; Daigo Kikuta. Intermediate Variable Extraction for Digital Twin Modeling in the Semiconductor Manufacturing Process. 2024 International Symposium on Semiconductor Manufacturing (ISSM). 2024-12-09. https://doi.org/10.1109/issm64832.2024.10874952

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