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Research literature / Conference paper

Virtual Metrology Based on Graph Convolutional Neural Network for Semiconductor PVD Process

Longfei Zhou; Dong Jin; Shuangwu Chen; Jian Yang; Jian Xie

Published
Publisher
IEEE
Journal / collection
2024 5th International Conference on Artificial Intelligence and Electromechanical Automation (AIEA)
Research area
AI & compute
Source type
Conference paper
DOI
10.1109/aiea62095.2024.10692635

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Longfei Zhou; Dong Jin; Shuangwu Chen; Jian Yang; Jian Xie. Virtual Metrology Based on Graph Convolutional Neural Network for Semiconductor PVD Process. 2024 5th International Conference on Artificial Intelligence and Electromechanical Automation (AIEA). 2024-06-14. https://doi.org/10.1109/aiea62095.2024.10692635

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