High-precision servo control design and optimization for dicing semiconductor wafer
Fengjun Chen; Jianhang Huang; Jialiang Xu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Processes
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmapro.2024.03.033
The original publisher provides the full text and its access options.
Cite this source
Fengjun Chen; Jianhang Huang; Jialiang Xu. High-precision servo control design and optimization for dicing semiconductor wafer. Journal of Manufacturing Processes. 2024-05. https://doi.org/10.1016/j.jmapro.2024.03.033