High-Precision Robotic Arm for Silicon Wafer Handling and Alignment in Small-Scale Semiconductor Fabrication
Luke Bassett; Maria Apostle; Federica Aveta
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE 15th Annual Ubiquitous Computing, Electronics & Mobile Communication Conference (UEMCON)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/uemcon62879.2024.10754678
The original publisher provides the full text and its access options.
Cite this source
Luke Bassett; Maria Apostle; Federica Aveta. High-Precision Robotic Arm for Silicon Wafer Handling and Alignment in Small-Scale Semiconductor Fabrication. 2024 IEEE 15th Annual Ubiquitous Computing, Electronics & Mobile Communication Conference (UEMCON). 2024-10-17. https://doi.org/10.1109/uemcon62879.2024.10754678