SHAP Analysis for Diagnosing Anomalies in Semiconductor Manufacturing
Joaquín Figueroa; Ibrahim Ahmed; Piero Baraldi; Enrico Zio
- Published
- Publisher
- Research Publishing Services
- Journal / collection
- 35th European Safety and Reliability Conference (ESREL 2025) and the 33rd Society for Risk Analysis Europe Conference (SRA-E 2025)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.3850/978-981-94-3281-3_esrel-sra-e2025-p0884-cd
The original publisher provides the full text and its access options.
Cite this source
Joaquín Figueroa; Ibrahim Ahmed; Piero Baraldi; Enrico Zio. SHAP Analysis for Diagnosing Anomalies in Semiconductor Manufacturing. 35th European Safety and Reliability Conference (ESREL 2025) and the 33rd Society for Risk Analysis Europe Conference (SRA-E 2025). 2025. https://doi.org/10.3850/978-981-94-3281-3_esrel-sra-e2025-p0884-cd