Semiconductor Wafer Defect Recognition Based on Improved Coordinate Attention Mechanism
Hao He; Yuanjie Wei; Xionghao Lin; Minmin Zhu; Haizhong Zhang
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Access
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/access.2025.3546781
The original publisher provides the full text and its access options.
Cite this source
Hao He; Yuanjie Wei; Xionghao Lin; Minmin Zhu; Haizhong Zhang. Semiconductor Wafer Defect Recognition Based on Improved Coordinate Attention Mechanism. IEEE Access. 2025. https://doi.org/10.1109/access.2025.3546781