Demand Analysis and Effectiveness Evaluation of Digital Twin System for Semiconductor Equipment Operation and Maintenance
- Published
- Publisher
- Clausius Scientific Press, Inc.
- Journal / collection
- Industrial Engineering and Innovation Management
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.23977/ieim.2025.080216
The original publisher provides the full text and its access options.
Cite this source
Clausius Scientific Press, Inc.. Demand Analysis and Effectiveness Evaluation of Digital Twin System for Semiconductor Equipment Operation and Maintenance. Industrial Engineering and Innovation Management. 2025. https://doi.org/10.23977/ieim.2025.080216