Implementation of a versatile and efficient monitoring system in semiconductor high-volume manufacturing
Hongye Gao; Linqiang Ye; Jingfeng Kang; Wei Li; Aijiao Zhu; Xuanyu Ta; Jincheng Pei; Kevin Huang
- Published
- Publisher
- SPIE
- Journal / collection
- Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3052961
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Cite this source
Hongye Gao; Linqiang Ye; Jingfeng Kang; Wei Li; Aijiao Zhu; Xuanyu Ta; Jincheng Pei; Kevin Huang. Implementation of a versatile and efficient monitoring system in semiconductor high-volume manufacturing. Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024). 2024-12-10. https://doi.org/10.1117/12.3052961