Recovery of Over-Target RuO2-Based Thick-Film Resistors by Laser Surface Modification and Dual-Step Trimming: An 8P7R Feasibility Study Toward Multilayer Hybrid Integrated Circuits
Yuan-Hwei Cheng; Jin-Siang Shaw
- Published
- Publisher
- MDPI AG
- Journal / collection
- Micromachines
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/mi17101164
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Cite this source
Yuan-Hwei Cheng; Jin-Siang Shaw. Recovery of Over-Target RuO2-Based Thick-Film Resistors by Laser Surface Modification and Dual-Step Trimming: An 8P7R Feasibility Study Toward Multilayer Hybrid Integrated Circuits. Micromachines. 2026-10-05. https://doi.org/10.3390/mi17101164