The Role of Semiconductor Thin Films in Advancing MEMS Sensor Technology
Mariana Amorim Fraga; Rodrigo Sávio Pessoa
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Sensors Reviews
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/sr.2025.3564231
The original publisher provides the full text and its access options.
Cite this source
Mariana Amorim Fraga; Rodrigo Sávio Pessoa. The Role of Semiconductor Thin Films in Advancing MEMS Sensor Technology. IEEE Sensors Reviews. 2025. https://doi.org/10.1109/sr.2025.3564231