Machine learning-driven soft plasma etching for precision structuring of biofunctional organic semiconductor films
Wei Wang; Mengna Dai; Xin Zou; Yu Zeng; Zile Zhao; Dai Linfeng; Qingqing Xie; Kai Yao; Shuqi Zhang; Yuping Quan; Yue Hu; Meng Gou; Zeyuan Gao; Zhenyan Wang; Xu Li; Lihong Qi; Kaifeng Shen; Yuheng Wang; Yaqing Zhang
- Published
- Publisher
- Royal Society of Chemistry (RSC)
- Journal / collection
- Journal of Materials Chemistry C
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1039/d5tc02791h
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Cite this source
Wei Wang; Mengna Dai; Xin Zou; Yu Zeng; Zile Zhao; Dai Linfeng; Qingqing Xie; Kai Yao; Shuqi Zhang; Yuping Quan; Yue Hu; Meng Gou; Zeyuan Gao; Zhenyan Wang; Xu Li; Lihong Qi; Kaifeng Shen; Yuheng Wang; Yaqing Zhang. Machine learning-driven soft plasma etching for precision structuring of biofunctional organic semiconductor films. Journal of Materials Chemistry C. 2025. https://doi.org/10.1039/d5tc02791h