Machine learning investigation of high-k metal gate processes for dynamic random access memory peripheral transistor
Namyong Kwon; JoonHo Bang; Won Ju Sung; Jung Hoon Han; Dongin Lee; Ilwoo Jung; Se Guen Park; Hyodong Ban; Sangjoon Hwang; Won Yong Shin; Jinhye Bae; Dongwoo Lee
- Published
- Publisher
- AIP Publishing
- Journal / collection
- APL Materials
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1063/5.0191100
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Cite this source
Namyong Kwon; JoonHo Bang; Won Ju Sung; Jung Hoon Han; Dongin Lee; Ilwoo Jung; Se Guen Park; Hyodong Ban; Sangjoon Hwang; Won Yong Shin; Jinhye Bae; Dongwoo Lee. Machine learning investigation of high-k metal gate processes for dynamic random access memory peripheral transistor. APL Materials. 2024-02-01. https://doi.org/10.1063/5.0191100