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Research literature / Conference paper

Rapid Analysis of Organic Contaminants in Semiconductor Process Chemicals and on Wafer Surfaces

Briana Dufek; Suhas Ketkar; Tyler Herek; Jake Unnerstall; Derrick Quarles; Kyle Uhlmeyer; Austin Schultz; Dan Wiederin

Published
Publisher
IEEE
Journal / collection
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/asmc61125.2024.10545524

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Briana Dufek; Suhas Ketkar; Tyler Herek; Jake Unnerstall; Derrick Quarles; Kyle Uhlmeyer; Austin Schultz; Dan Wiederin. Rapid Analysis of Organic Contaminants in Semiconductor Process Chemicals and on Wafer Surfaces. 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2024-05-13. https://doi.org/10.1109/asmc61125.2024.10545524

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