Digitalization Solutions for Automated Material Handling Systems in Semiconductor Smart Factories
Ruiji Wang
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/cstic61820.2024.10531903
The original publisher provides the full text and its access options.
Cite this source
Ruiji Wang. Digitalization Solutions for Automated Material Handling Systems in Semiconductor Smart Factories. 2024 Conference of Science and Technology for Integrated Circuits (CSTIC). 2024-03-17. https://doi.org/10.1109/cstic61820.2024.10531903