Multifunctional Shuttle for Processing Small Diameter and Ultra-Thin Semiconductor Wafers
N. A. Djuzhev; E. E. Gusev; M. Y. Fomichev; P. S. Ivanin; I. V. Kushnarev; V. A. Bespalov
- Published
- Publisher
- Pleiades Publishing Ltd
- Journal / collection
- Mechanics of Solids
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1134/s0025654424605226
The original publisher provides the full text and its access options.
Cite this source
N. A. Djuzhev; E. E. Gusev; M. Y. Fomichev; P. S. Ivanin; I. V. Kushnarev; V. A. Bespalov. Multifunctional Shuttle for Processing Small Diameter and Ultra-Thin Semiconductor Wafers. Mechanics of Solids. 2025-04. https://doi.org/10.1134/s0025654424605226