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Dependence of the capacitance of trap states at the oxide–semiconductor interface on the interface trap density in nanoscale silicon-on-insulator FinFET transistors and its effect on electrophysical parameters

Mirzabakhrom Foziljonov; Nuritdin Yunusaliev; Biloliddin Ergashev; Oybek Muminov; Gaybullo Tojiboyev

Published
Publisher
WNGB Scientific Publishing House Sp. z o.o.
Journal / collection
Advances in Science and Technology Research Journal
Research area
Semiconductors
Source type
Journal article
DOI
10.12913/22998624/225650

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Mirzabakhrom Foziljonov; Nuritdin Yunusaliev; Biloliddin Ergashev; Oybek Muminov; Gaybullo Tojiboyev. Dependence of the capacitance of trap states at the oxide–semiconductor interface on the interface trap density in nanoscale silicon-on-insulator FinFET transistors and its effect on electrophysical parameters. Advances in Science and Technology Research Journal. 2026-10-01. https://doi.org/10.12913/22998624/225650

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