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Research literature / Conference paper

A New Operational Method for Green Transformation in Semiconductor Manufacturing

Toshiya Soyama; Hironori Chatani; Daisuke Kawakubo; Tetsuya Shinozaki; Koji Fukugawa

Published
Publisher
IEEE
Journal / collection
2024 International Symposium on Semiconductor Manufacturing (ISSM)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/issm64832.2024.10874935

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Toshiya Soyama; Hironori Chatani; Daisuke Kawakubo; Tetsuya Shinozaki; Koji Fukugawa. A New Operational Method for Green Transformation in Semiconductor Manufacturing. 2024 International Symposium on Semiconductor Manufacturing (ISSM). 2024-12-09. https://doi.org/10.1109/issm64832.2024.10874935

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