TCAD Structure Input File Generation Using Large Language Model
Le Minh Long Nguyen; Albert Lu; Hiu Yung Wong
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/sispad62626.2024.10733015
The original publisher provides the full text and its access options.
Cite this source
Le Minh Long Nguyen; Albert Lu; Hiu Yung Wong. TCAD Structure Input File Generation Using Large Language Model. 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD). 2024-09-24. https://doi.org/10.1109/sispad62626.2024.10733015