Unlocking Insights into 3D Transistor Defects: The Power of Supplementing TEM with Elemental Electron Tomography
Yu Zhang; Kevin Davidson; Po-Cheng Lu; Frieder Baumann; Travis Mitchell
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2024p0374
The original publisher provides the full text and its access options.
Cite this source
Yu Zhang; Kevin Davidson; Po-Cheng Lu; Frieder Baumann; Travis Mitchell. Unlocking Insights into 3D Transistor Defects: The Power of Supplementing TEM with Elemental Electron Tomography. International Symposium for Testing and Failure Analysis. 2024-10-28. https://doi.org/10.31399/asm.cp.istfa2024p0374