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Back-End-of-Line Compatible Transistor With Ultrathin InZnO Channel Enabling Operations in Cryogenic Environments

Nayeon Kim; Hyoungjin Park; Jiae Jeong; Hyun Wook Kim; Eunryeong Hong; Seonuk Jeon; Hyeonsik Choi; Yunsur Kim; Jiyong Woo

Published
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Journal / collection
IEEE Electron Device Letters
Research area
Semiconductors
Source type
Journal article
DOI
10.1109/led.2024.3435403

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Nayeon Kim; Hyoungjin Park; Jiae Jeong; Hyun Wook Kim; Eunryeong Hong; Seonuk Jeon; Hyeonsik Choi; Yunsur Kim; Jiyong Woo. Back-End-of-Line Compatible Transistor With Ultrathin InZnO Channel Enabling Operations in Cryogenic Environments. IEEE Electron Device Letters. 2024-10. https://doi.org/10.1109/led.2024.3435403

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