Skip to content
OPEN VARIABLE

Evidence-First Signal Intelligence

Menu

Research literature / Journal article

Evaluation of Potential Occupational Exposure and Release of Nanoparticles in Semiconductor-Manufacturing Environments

Zhaobo Zhang; Paul Westerhoff; Pierre Herckes

Published
Publisher
MDPI AG
Journal / collection
Atmosphere
Research area
Semiconductors
Source type
Journal article
DOI
10.3390/atmos15030301

Read the original source ↗

The original publisher provides the full text and its access options.

Cite this source

Zhaobo Zhang; Paul Westerhoff; Pierre Herckes. Evaluation of Potential Occupational Exposure and Release of Nanoparticles in Semiconductor-Manufacturing Environments. Atmosphere. 2024-02-28. https://doi.org/10.3390/atmos15030301

Download RIS