E-beam simulation for advanced SEM applications in semiconductor industry
Wooyoung Cheon; Taejin Moon; In Kwon; Jinwoo Lee; Jaeyong Lee; Yongjae Kwon; Ashok Ramu; Seonghoon Jin; Tsuji Yukihide; Hyunwoo Chae; Chulwoo Park; Hyunsuk Choi; Kwangseok Lee; Byungseong Ahn; Jaehun Yang; Ami Ma; Qhwan Kim; Donghyeok Im; Jaehyun Bae; Jongcheon Sun
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XXXVIII
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3010074
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Wooyoung Cheon; Taejin Moon; In Kwon; Jinwoo Lee; Jaeyong Lee; Yongjae Kwon; Ashok Ramu; Seonghoon Jin; Tsuji Yukihide; Hyunwoo Chae; Chulwoo Park; Hyunsuk Choi; Kwangseok Lee; Byungseong Ahn; Jaehun Yang; Ami Ma; Qhwan Kim; Donghyeok Im; Jaehyun Bae; Jongcheon Sun. E-beam simulation for advanced SEM applications in semiconductor industry. Metrology, Inspection, and Process Control XXXVIII. 2024-04-10. https://doi.org/10.1117/12.3010074