Probabilistic Modeling and Machine Learning for Preventative Maintenance Prediction in Semiconductor Manufacturing
Tori Wright; Brian Tse; Emmanuel Nsiye; Timothy Azinord; David Medina; Sean Mondesire
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/asmc61125.2024.10545532
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Cite this source
Tori Wright; Brian Tse; Emmanuel Nsiye; Timothy Azinord; David Medina; Sean Mondesire. Probabilistic Modeling and Machine Learning for Preventative Maintenance Prediction in Semiconductor Manufacturing. 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2024-05-13. https://doi.org/10.1109/asmc61125.2024.10545532