Hybrid Semiconductor Wafer Inspection Framework via Autonomous Data Annotation
Changheon Han; Heebum Chun; Jiho Lee; Fengfeng Zhou; Huitaek Yun; ChaBum Lee; Martin B.G. Jun
- Published
- Publisher
- ASME International
- Journal / collection
- Journal of Manufacturing Science and Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1115/1.4065276
The original publisher provides the full text and its access options.
Cite this source
Changheon Han; Heebum Chun; Jiho Lee; Fengfeng Zhou; Huitaek Yun; ChaBum Lee; Martin B.G. Jun. Hybrid Semiconductor Wafer Inspection Framework via Autonomous Data Annotation. Journal of Manufacturing Science and Engineering. 2024-05-09. https://doi.org/10.1115/1.4065276