Non-PFAS biomass EUV resist for sustainable semiconductor manufacturing
Kazuyo Morita
- Published
- Publisher
- SPIE
- Journal / collection
- Advances in Patterning Materials and Processes XLI
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3010636
The original publisher provides the full text and its access options.
Cite this source
Kazuyo Morita. Non-PFAS biomass EUV resist for sustainable semiconductor manufacturing. Advances in Patterning Materials and Processes XLI. 2024-04-09. https://doi.org/10.1117/12.3010636