Survey of semiconductor wafer defect detection method based on machine vision
Hu Zhiqiang; 南京航空航天大学电子信息工程学院，南京 211106 College of Electronic and Information Engineering， Nanjing University of Aeronautics and Astronautics， Nanjing 211106， China; Wu Yiquan
- Published
- Publisher
- Aerospace Information Research Institute, Chinese Academy of Sciences
- Journal / collection
- Journal of Image and Graphics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.11834/jig.240053
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Cite this source
Hu Zhiqiang; 南京航空航天大学电子信息工程学院，南京 211106 College of Electronic and Information Engineering， Nanjing University of Aeronautics and Astronautics， Nanjing 211106， China; Wu Yiquan. Survey of semiconductor wafer defect detection method based on machine vision. Journal of Image and Graphics. 2025. https://doi.org/10.11834/jig.240053