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Research literature / Conference paper

Explainable AutoML (xAutoML) with Adaptive Modeling for Yield Enhancement in Semiconductor Smart Manufacturing

Weihong Zhai; Qing Han; Lisheng Chen; Xiupeng Shi

Published
Publisher
IEEE
Journal / collection
2024 2nd International Conference on Artificial Intelligence and Automation Control (AIAC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/aiac63745.2024.10899729

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Weihong Zhai; Qing Han; Lisheng Chen; Xiupeng Shi. Explainable AutoML (xAutoML) with Adaptive Modeling for Yield Enhancement in Semiconductor Smart Manufacturing. 2024 2nd International Conference on Artificial Intelligence and Automation Control (AIAC). 2024-12-20. https://doi.org/10.1109/aiac63745.2024.10899729

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