Nanometrology for size and chemical analysis of semiconductor process impurity
Alice Chinghsuan Chang; Fang-Hsin Lin; Wei-En Fu
- Published
- Publisher
- Bureau International des Poids et Mesures (BIPM)
- Journal / collection
- 150th anniversary of the Metre Convention — From Units to the Universe
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.59161/orex0731
The original publisher provides the full text and its access options.
Cite this source
Alice Chinghsuan Chang; Fang-Hsin Lin; Wei-En Fu. Nanometrology for size and chemical analysis of semiconductor process impurity. 150th anniversary of the Metre Convention — From Units to the Universe. 2025. https://doi.org/10.59161/orex0731