Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication
Song Yi Baek; Jingyu Park; Taeyoung Koh; Dohyung Kim; Jewoung Woo; Jinwoo Jung; Se Jun Park; Changsoo Lee; Chulhwan Choi
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- International Journal of Precision Engineering and Manufacturing-Green Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s40684-024-00606-y
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Cite this source
Song Yi Baek; Jingyu Park; Taeyoung Koh; Dohyung Kim; Jewoung Woo; Jinwoo Jung; Se Jun Park; Changsoo Lee; Chulhwan Choi. Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication. International Journal of Precision Engineering and Manufacturing-Green Technology. 2024-04-05. https://doi.org/10.1007/s40684-024-00606-y