Two-Step Framework for Predictive Maintenance of Cryogenic Pumps in Semiconductor Manufacturing
Sanjoy Kumar Saha; M. M. Manjurul Islam; Shaun McFadden; Saugat Bhattacharyya; Mark Gorman; Girijesh Prasad
- Published
- Publisher
- PHM Society
- Journal / collection
- Annual Conference of the PHM Society
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.36001/phmconf.2024.v16i1.4180
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Cite this source
Sanjoy Kumar Saha; M. M. Manjurul Islam; Shaun McFadden; Saugat Bhattacharyya; Mark Gorman; Girijesh Prasad. Two-Step Framework for Predictive Maintenance of Cryogenic Pumps in Semiconductor Manufacturing. Annual Conference of the PHM Society. 2024-11-11. https://doi.org/10.36001/phmconf.2024.v16i1.4180