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Research literature / Conference paper

Advanced Development of Squeeze Effect Non-Contact Handling Tool for Semiconductor Chips

Hayato Hishinuma; Masaaki Miyatake; Hiroshi Kikuchi; Yuta Tobari

Published
Publisher
IEEE
Journal / collection
2024 International 3D Systems Integration Conference (3DIC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/3dic63395.2024.10830266

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Hayato Hishinuma; Masaaki Miyatake; Hiroshi Kikuchi; Yuta Tobari. Advanced Development of Squeeze Effect Non-Contact Handling Tool for Semiconductor Chips. 2024 International 3D Systems Integration Conference (3DIC). 2024-09-25. https://doi.org/10.1109/3dic63395.2024.10830266

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