Optimization of cleaning process in semiconductor gas delivery system by computational fluid dynamics simulation
Ireh Seo; Rakyoung Jeon; Tae-ung Yoon; Chang-Ha Lee
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Process Safety and Environmental Protection
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.psep.2024.08.081
The original publisher provides the full text and its access options.
Cite this source
Ireh Seo; Rakyoung Jeon; Tae-ung Yoon; Chang-Ha Lee. Optimization of cleaning process in semiconductor gas delivery system by computational fluid dynamics simulation. Process Safety and Environmental Protection. 2024-11. https://doi.org/10.1016/j.psep.2024.08.081