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Research literature / Conference paper

Advancing Semiconductor Manufacturing through DNA- Templated Lithography and Molecular-Scale Patterning of 2D Materials

Anumita Kumari; Michael Curtis; Arpan De; Haitao Liu; David Estrada; M.P. Anantram

Published
Publisher
IEEE
Journal / collection
2024 IEEE Workshop on Microelectronics and Electron Devices (WMED)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/wmed61554.2024.10534135

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Anumita Kumari; Michael Curtis; Arpan De; Haitao Liu; David Estrada; M.P. Anantram. Advancing Semiconductor Manufacturing through DNA- Templated Lithography and Molecular-Scale Patterning of 2D Materials. 2024 IEEE Workshop on Microelectronics and Electron Devices (WMED). 2024-03-29. https://doi.org/10.1109/wmed61554.2024.10534135

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