Volume-adjusted prioritization of suspected equipment by forecasting latent defect risk in uninspected wafers under sparse and irregular semiconductor defect monitoring
Kyu-Hoon Kim; Dong-Hee Lee
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Computers & Industrial Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.cie.2026.112291
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Cite this source
Kyu-Hoon Kim; Dong-Hee Lee. Volume-adjusted prioritization of suspected equipment by forecasting latent defect risk in uninspected wafers under sparse and irregular semiconductor defect monitoring. Computers & Industrial Engineering. 2026-10. https://doi.org/10.1016/j.cie.2026.112291