Theoretical Study on Structural and Electronic Properties of Interstitial Oxygen Defects in Amorphous Indium Gallium Oxide for Transistor Reliability
Chitra Pandy; Masaharu Kobayashi
- Published
- Publisher
- The Japan Society of Applied Physics
- Journal / collection
- Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.7567/ssdm.2024.k-1-06
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Cite this source
Chitra Pandy; Masaharu Kobayashi. Theoretical Study on Structural and Electronic Properties of Interstitial Oxygen Defects in Amorphous Indium Gallium Oxide for Transistor Reliability. Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials. 2024-09-02. https://doi.org/10.7567/ssdm.2024.k-1-06