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Research literature / Conference paper

Adhesion measurements of Polyimide to silicon nitride for semiconductor component applications

Moritz Hartleb; Peter Imrich; Johannes Zechner; Thomas Walter; Golta Khatibi

Published
Publisher
IEEE
Journal / collection
2024 47th International Spring Seminar on Electronics Technology (ISSE)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/isse61612.2024.10603751

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Moritz Hartleb; Peter Imrich; Johannes Zechner; Thomas Walter; Golta Khatibi. Adhesion measurements of Polyimide to silicon nitride for semiconductor component applications. 2024 47th International Spring Seminar on Electronics Technology (ISSE). 2024-05-15. https://doi.org/10.1109/isse61612.2024.10603751

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