Laser-driven light source for FTIR applications in semiconductor manufacturing and metrology
Nanu Brates; Vikram Singh; Renaud Richard
- Published
- Publisher
- SPIE
- Journal / collection
- Photonic Instrumentation Engineering XII
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3043256
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Cite this source
Nanu Brates; Vikram Singh; Renaud Richard. Laser-driven light source for FTIR applications in semiconductor manufacturing and metrology. Photonic Instrumentation Engineering XII. 2025-03-19. https://doi.org/10.1117/12.3043256