Geometry Study on Split-Gate Type String Select Transistor of 3d Nand Memory
ChuHeng Xu; Gang Zhang; Jingwen Hou; QianHui Li; Xin Gong; Jing Zhou; Qi Wang; Bao Zhang; Zongliang Huo
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.5177825
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Cite this source
ChuHeng Xu; Gang Zhang; Jingwen Hou; QianHui Li; Xin Gong; Jing Zhou; Qi Wang; Bao Zhang; Zongliang Huo. Geometry Study on Split-Gate Type String Select Transistor of 3d Nand Memory. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5177825